Stacked storage capacitor-on-gate structure for a thin film transistor liquid crystal display

ABSTRACT

A stacked storage capacitor structure for use in each pixel of a TFT-LCD, wherein a first storage capacitor is formed by a first metal layer, a gate insulator layer and a second metal layer. The second capacitor is formed by the second metal layer, a passivation insulator layer and an ITO layer. The first metal layer and the ITO layer are joined together through a via hole which is etched in one insulator etching step during the overall fabrication process through both the gate insulator and the passivation insulator layers. As such, the two capacitors are connected in parallel in a stacked configuration. With the stacked storage capacitor structure, the charge storage capacity is increased without significantly affecting the aperture ratio of a pixel. The ITO and the pixel electrode can be different parts of an indium tine oxide layer deposited on the passivation insulator layer.

This patent application is a divisional application of and claimsbenefits to a patent application Ser. No. 11/004,389, filed Dec. 3, 2004now U.S. Pat. No. 7,675,582.

TECHNICAL FIELD

The present invention relates to a storage capacitor structure for usein a thin film transistor liquid crystal display particularly anamorphous silicon thin film transistor liquid crystal display.

BACKGROUND OF THE INVENTION

It is known in the art that thin film transistor liquid crystal displays(commonly referred to as TFT-LCD) seek to minimize the area needed forthe storage capacitor used in such displays especially as the resolutionof the display increases and therefore the pixel size decreases. Theincrease in display resolution is especially important for amorphoussilicon TFT-LCD displays (a-Si TFT-LCDs). In particular, it is wellknown that as the display resolution increases, the area available oneach pixel of such displays for the fabrication of the storage capacitoris diminished due to aperture ratio considerations. What this means isthat for a given pixel it is desired that as the overall size of thepixel decreases, that the maximum amount of the pixel area be devoted tothe pixel electrode rather than the storage capacitor associated withthe pixel. As a result, as the resolution of a-Si TFT-LCD's hasincreased, the size of the storage capacitor is reduced to a point thatthe charge storage capacity significantly affects the performance of theoverall LCD display in terms of artifacts such as flicker, imageretention and cross-talk. It is therefore important that the storagecapacitance and, particularly the area ratio of pixel electrode to thestorage capacitance, be increased without adversely affecting theaperture ratio of the pixel.

In a conventional a-Si TFT-LCD fabrication process, the storagecapacitor is either a metal-insulator-metal (MIM) structure or ametal-insulation-ITO (MII) structure. In the MIM structure, the firstcapacitor plate is the gate metal and the second capacitor plate is thesource drain metal separated by the gate insulator layer. In the MIIstructure, the first capacitor plate is the gate metal and the secondcapacitor plate is the ITO (indium-tin oxide) electrode separated byboth the gate insulator layer and the passivation insulator layer.However, when the resolution is increased, the area available for thestorage capacitor is difficult to maintain without sacrificing theaperture ratio.

In order to increase charge storage capacity without sacrificing theaperture ratio of the pixel, or to maintain the charge storage capacitywhile increasing the aperture ratio of the pixel in an a-Si TFT-LCDdisplay, it would be desirable to better utilize all layers ofconductors and insulators for purposes of increasing the capacitance ofthe storage capacitor.

SUMMARY OF THE INVENTION

It is a primary objective of the present invention to increase thecharge storage capacity without significantly affecting the apertureratio in a pixel. The present invention is directed to betterutilization of all layers of conductors and insulators for thefabrication of a storage capacitor in an associated pixel of an a-SiTFT-LCD array without changing the currently used fabrication processesfor such a-Si TFT-LCD's. To accomplish this result, the source drainmetal (M2) is used as a shared capacitor plate in a stacked capacitorstructure comprising an MIM structure and a modified MII structureconnected in parallel. In particular, the gate metal (M1) and thesource-drain metal (M2) sandwich the gate insulator layer so as to forma first capacitor, and the second metal (M2) and the indium titaniumoxide (ITO) electrode sandwich a passivation insulator layer so as toform a second capacitor. The two storage capacitors are stackedsubstantially on top of each other and are interconnected so as to beelectrically in parallel with each other, thereby raising the overallcapacitance of the storage capacitor while maintaining approximately thesame area on the pixel as would be used in conventional storagecapacitor fabrication.

More particularly, in an a-Si TFT-LCD display a stacked storagecapacitor structure is described herein wherein a first storagecapacitor is formed by the first metal layer acting as a first plate andthe second metal layer acting as a second plate, with the gate insulatorlayer sandwiched in between acting as the insulator for the firststorage capacitor. The second capacitor is formed by use of the secondmetal electrode (M2) acting as the second plate and the ITO electrodeacting as the first plate of the second capacitor, with the passivationinsulator layer acting as the insulator for the second storagecapacitor. The second metal electrode (M2) is shared by both capacitorsand the second capacitor is stacked on top of the first capacitor. Thefirst metal electrode (M1) and the ITO electrode are joined togetherthrough a via hole and this via hole is etched in one insulator etchingstep during the overall fabrication process through both the gateinsulator and the passivation insulator layers. The middle electrode forthe stacked structure is therefore the second metal which is connectedto the pixel electrode through via holes in the passivation insulatorlayer. The ITO electrode is connected to the first metal electrode (M1)through a via hole which is etched through the gate insulator and thepassivation insulator. The pixel electrode is connected to the drain ofthe TFT through another via hole in the passivation insulator.

Thus, the first aspect of the present invention provides a stackedstorage capacitor structure for a thin film transistor liquid crystaldisplay having a plurality of pixels, each pixel having a pixel area,wherein at least some of the pixels have a storage capacitor formedsubstantially within the pixel area and associated with a stackedstorage capacitor structure. The stacked storage capacitor structurecomprises:

-   -   a first storage capacitor having a first plate formed by a first        electrically conductive layer, a second plate formed by a second        electrically conductive layer and a dielectric formed by a first        insulator layer positioned between the first electrically        conductive layer and the second electrically conductive layer;        and    -   a second storage capacitor having a first plate formed by a        third electrically conductive layer, a second plate formed by        the second electrically conductive layer and a dielectric formed        by a second insulator layer positioned between the first and        second plates, wherein the first electrically conductive layer        and the third electrically conductive layer are electrically        connected to each other so that the first and second storage        capacitors are electrically connected in parallel, and wherein        the second electrically conductive layer is positioned between        the first electrically conductive layer and the third        electrically conductive layer.

According to the present invention, each of said at least some of thepixels has a gate line disposed at one edge section of the pixel areafor controlling electric charges in the storage capacitor, and thestorage capacitor is formed substantially in said one edge section.

According to the present invention, each of said at least some of thepixels has a semiconductor switching element and a pixel electrodeelectrically connected to the switching element, and the pixel electrodeis located within the pixel area adjacent to said one edge section in anon-overlapping manner.

According to the present invention, the switching element has a firstswitching end, a second switching end and a switching control terminal,the first switching end operatively connected to a signal line, thesecond end operatively connected to the pixel electrode, and each ofsaid at least some of the pixels further comprises a further gate lineoperatively connected to the switching control terminal of the switchelement for causing the opening and closing between the first and secondswitching ends.

According to the present invention, the second electrically conductivelayer (M2) is operatively connected to the second switching end of theswitching element via the pixel electrode and the first electricallyconductive layer (M1) is operatively connected to the gate line.

According to the present invention, the first switching end is a sourceterminal, the second switching end is a drain terminal, and theswitching control terminal is a gate terminal of a transistor, whereinthe first electrically conductive layer is a gate metal layer, the firstinsulator layer is a gate insulator layer and second electricallyconductive layer is a source-drain metal layer, and the thirdelectrically conductive layer is made substantially of indium-tin oxide,and the second insulator layer is a passivation insulator layer.

According to the present invention, part of the passivation insulatorlayer is disposed adjacent to part of the gate insulator layer, and thepixel electrode is made substantially of indium-tin oxide, and at leastpart of the pixel electrode and part of the third electrically conductorlayer are disposed on different sections of the passivation insulatorlayer.

Alternatively, each of said at least some of the pixels comprises

a semiconductor switching element;

a gate line disposed at one edge section of the pixel area forcontrolling the switching element; and

a common line disposed in a pixel section spaced from the gate line forcontrolling electric charges in the storage capacitor, and wherein thestorage capacitor is formed substantially in said pixel section.

According to the present invention, each of said at least some of thepixels has a first pixel electrode segment and a second pixel electrodesegment located within the pixel area and separated by said pixelsection in a non-overlapping manner.

According to the present invention, the common line is substantiallyparallel to the gate line.

According to the present invention, the switching element has a firstswitching end, a second switching end and a switching control terminal,the first switching end operatively connected to a signal line, thesecond end operatively connected to the first pixel electrode segment,wherein each of said at least some of the pixels further comprises agate line operatively connected to the switching control terminal of theswitch element for causing the opening and closing between the first andsecond switching ends.

According to the present invention, the second electrically conductivelayer (M2) is operatively connected to the second switching end of theswitching element via the pixel electrode and the first electricallyconductive layer (M1) is operatively connected to the common line.

According to the present invention, the first switching end is a sourceterminal, the second switching end is a drain terminal, and theswitching control terminal is a gate terminal of a transistor, whereinthe first electrically conductive layer is a gate metal layer, the firstinsulator layer is a gate insulator layer and second electricallyconductive-layer is a source-drain metal layer, and the thirdelectrically conductive layer is made substantially of indium-tin oxide,and the second insulator layer is a passivation insulator layer.

According to the present invention, part of the passivation insulatorlayer is disposed adjacent to part of the gate insulator layer, and thefirst and second pixel electrode segment are made substantially ofindium-tin oxide, wherein at least part of the first and second pixelelectrode segments and part of the third electrically conductor layerare disposed on different sections of the passivation insulator layer.

The second aspect of the present invention provides a method ofincreasing charge storage capacity in a thin film transistor liquidcrystal display having a plurality of pixels, each pixel having a pixelarea and a pixel electrode located within the pixel area, wherein atleast some of the pixels have a storage capacitor structure formed at asection of the pixel area substantially within the pixel area forstoring electric charges associated with the pixel electrode, andwherein the section is adjacent to the pixel electrode in anon-overlapping manner. The method comprising the steps of:

-   -   forming a first storage capacitor having a first plate formed by        a first electrically conductive layer, a second plate formed by        a second electrically conductive layer and a dielectric formed        by a first insulator layer positioned between the first        electrically conductive layer and the second electrically        conductive layer; and    -   forming a second storage capacitor having a first plate formed        by a third electrically conductive layer, a second plate formed        by the second electrically conductive layer and a dielectric        formed by a second insulator layer positioned between the first        and second plates; and    -   electrically connecting the first electrically conductive layer        to the third electrically conductive layer so that the first and        second storage capacitors are electrically connected in parallel        for forming the storage capacitor structure, and wherein the        second electrically conductive layer is positioned between the        first electrically conductive layer and the third electrically        conductive layer.

The third aspect of the present invention provides a thin filmtransistor liquid crystal display, comprising:

a plurality of pixels arranged in rows and columns, each pixel having apixel area,

a plurality of signal lines disposed between the pixel columns; and

a plurality of gate lines disposed between the pixel rows, wherein atleast some of the pixels have a storage capacitor formed substantiallywithin the pixel area, the storage capacitor comprising:

-   -   a first storage capacitor having a first plate formed by a first        electrically conductive layer, a second plate formed by a second        electrically conductive layer and a dielectric formed by a first        insulator layer positioned between the first electrically        conductive layer and the second electrically conductive layer;        and    -   a second storage capacitor having a first plate formed by a        third electrically conductive layer, a second plate formed by        the second electrically conductive layer and a dielectric formed        by a second insulator layer positioned between the first and        second plates, wherein the first electrically conductive layer        and the third electrically conductive layer are electrically        connected to each other so that the first and second storage        capacitors are electrically connected in parallel, and wherein        the second electrically conductive layer is positioned between        the first electrically conductive layer and the third        electrically conductive layer.

According to the present invention, each of said at least some of thepixels has a further gate line disposed at one edge section of the pixelarea for controlling electric charges in the storage capacitor, and thestorage capacitor is formed substantially in said one edge section.

According to the present invention, each of said at least some of thepixels has a semiconductor switching element and a pixel electrodeelectrically connected to the switching element, and the pixel electrodeis located within the pixel area adjacent to said one edge section in anon-overlapping manner.

According to the present invention, the switching element has a firstswitching end, a second switching end and a switching control terminal,the first switching end operatively connected to one of said pluralityof signal lines, the second end operatively connected to the pixelelectrode, and wherein the switching control terminal of the switchelement is operatively connected to one of said plurality of gate linesfor causing the opening and closing between the first and secondswitching ends.

Alternatively, each of said at least some of the pixels comprises

a semiconductor switching element operatively connected to the gateline; and

a common line disposed in a pixel section spaced from the gate line forcontrolling electric charges in the storage capacitor, and wherein thestorage capacitor is formed substantially in said pixel section.

According to the present invention, each of said at least some of thepixels has a first pixel electrode segment and a second pixel electrodesegment located within the pixel area and separated by said pixelsection in a non-overlapping manner, and the common line is disposedbetween two adjacent gate lines.

According to the present invention, the switching element has a firstswitching end, a second switching end and a switching control terminal,wherein the first switching end is operatively connected to one of saidplurality of signal lines, the second end is operatively connected tothe first pixel electrode segment, and the switching control terminal ofthe switch element is operatively connected to one of the gate lines forcausing the opening and closing between the first and second switchingends.

The present invention will become apparent upon reading the descriptiontaken in conjunction with FIGS. 1-8.

BRIEF DESCRIPTION OF THE DRAWINGS

For a better understanding of the nature of the present invention,reference is made to the following figures in which:

FIG. 1 is a plan view of a pixel where the storage capacitor isfabricated as a storage capacitor-on-gate (Cs-on-gate) design;

FIG. 2 is a cross-sectional view taken along line 2-2′ of the pixel ofFIG. 1;

FIG. 3 is a cross-sectional view taken along line 3-3′ of the pixel ofFIG. 1;

FIG. 4 is a plan view of a pixel where the storage capacitor isfabricated as a storage capacitor-on-common (Cs-on-com) design;

FIG. 5 is a cross-sectional view taken along line 5-5′ of the pixel ofFIG. 4;

FIG. 6 is a cross-sectional view taken along line 6-6′ of the pixel ofFIG. 4;

FIG. 7 shows an equivalent circuit of the pixel of FIG. 1; and

FIG. 8 shows an equivalent circuit of the pixel of FIG. 2.

DETAILED DESCRIPTION OF THE INVENTION

As best seen in FIGS. 1, 2 and 3, a pixel according to the presentinvention which typically forms part of a pixel array comprises twogeneral areas, one associated with the pixel electrode 10 and anotherassociated with the control and storage capacitor area 12. The pixelfabrication technique shown in FIGS. 1, 2 and 3 is known in the art as astorage capacitor-on-gate design (Cs-on-gate). The fabrication techniquein general is with regard to an amorphous silicon thin film transistorliquid crystal display (a-Si TFT-LCD) although the principles describedcould be used for other types of TFT-LCD displays, and as a p-Si TFT-LCDdisplay.

As seen in FIGS. 1, 2 and 3, a storage capacitor for use in maintainingthe state of the pixel electrode and thus of the LCD pixel betweenscans, comprises two storage capacitors shown diagrammatically as C1 andC2. The first capacitor C1 is formed between a first metal layer M1(gate electrode) and a second metal layer M2. The second capacitor C2 isalso shown diagrammatically in FIGS. 2 and 3 and is formed between thesecond metal layer M2 and an indium tin oxide (ITO) layer 20. Forcapacitor C1, metal layer M1 forms the first plate of the capacitor andmetal layer M2 forms the second plate of the capacitor and thedielectric material therebetween is the gate insulator 22. For capacitorC2, the second plate is fabricated by the same metal layer M2 and thefirst plate is formed by the ITO layer 20. The dielectric between thesetwo plates is the passivation insulator layer 24.

Capacitors C1 and C2 therefore share one plate, namely the metal layerM2, and the two capacitors are electrically connected in parallel toeach other by the ITO layer 20 making contact with the metal layer M1 bymeans of Via 3 at region 26.

For fabricating such an a-Si TFT-LCD a five-mask process is typicallyused. Such a process is well known in the art. First, the gate metal M1is deposited on a glass substrate 30. This gate metal is then patternedto the particular design needed for the pixels. A nitride layer is thendeposited. Part of the nitride layer is the gate insulator layer 22.This is followed by the forming of an amorphous silicon (a-Si) and n+doped amorphous silicon layer (n+ a-Si) by a plasma-enhanced chemicalvapor deposition (PECVD) process. In addition, n+ a-Si and a-Si islandsare formed on the nitride layer. Then a metal layer is deposited andpatterned so as to form the source-drain electrode and the sharedcapacitor plate M2. After the etching of n+ a-Si to form the conductingchannel for the thin film transistor (TFT) 50, a passivation insulatorlayer 24 is deposited. Via holes Via 1, Via 2 and Via 3 are then createdby selective etching. Via 1 is used for the drain contact, and Via 2 isused for providing a contact point on the shared capacitor plate M2. Via3 is for providing a contact point on the gate metal layer M1 (gateelectrode). Via 1 and Vail 2 are created by etching the passivationinsulator layer 24, while Via 3 is created by etching both thepassivation insulator layer 24 and the gate insulator layer 22. An ITOlayer is then deposited on top of the etched layers and patterned. Afteretching, part of the ITO layer forms the pixel electrode 10, whichcontacts the source-drain metal or the shared capacitor plate M2 throughVia 2. The pixel electrode 10 is also connected to the drain contactthrough Via 1. As such, the shared capacitor plate M2 is electricallyconnected to the drain of the TFT 50 through the pixel electrode 10. Thepart of the ITO layer that forms the ITO layer 20 and serves as the topcapacitor plate for storage capacitor C2 is connected to the gateelectrode (gate metal) M1 through Via 3 (see FIG. 7). In this manner, astacked storage capacitor structure comprising capacitors C1 and C2 isformed.

As can be seen in FIGS. 2 and 3, this stacked storage capacitorstructure effectively uses the same general area 12 (see FIG. 1) thatwould otherwise be used for a storage capacitor comprising only a singlepair of plates; but by the design of the present invention, the stackedstorage capacitor effectively obtains a second pair of plates to formcapacitor C2, thereby nearly doubling the total capacitance of thestorage capacitor while maintaining approximately the same area thatwould otherwise be used to form a storage capacitor with only a singlepair of plates. The equivalent circuit of the pixel structure of FIG. 1is shown in FIG. 7.

FIGS. 4, 5 and 6 show another technique used to form an a-Si TFT-LCDdisplay known as storage capacitor-on-common (Cs-on-com) design. As seenin FIG. 4, two pixel electrode segments 11 and 11′ are separated by aregion 13 having a common line M1. It is in this region that the stackedstorage capacitor structure according to the present invention isformed.

FIGS. 5 and 6 show the cross-sectional views taken along lines 5-5′ and6-6′ respectively. In this fabrication design, capacitor C1 has a firstplate formed by the metal layer M1 (common line) and a second plateformed by the source-drain metal M2. The gate insulator layer 22 formsthe dielectric for capacitor C1. The second capacitor C2 has a firstplate formed by the ITO layer 20 and a second plate formed by thesource-drain metal M2. The passivation insulator layer 24 is thedielectric for capacitor C2. Thus, C1 and C2 have a shared capacitorplate M2. The pixel electrode 11′ is connected to the drain electrode 28of the TFT 50 by Via 1 (see FIG. 4). The pixel electrode segment 11′ isalso connected to the shared capacitor plate M2 through Via 4.Similarly, the pixel electrode segment 11 is connected to the sharedcapacitor plate M2 through Via 3. The ITO layer 20 for capacitor C2 isconnected to the common line M1 through Via 2 see FIG. 8). In thismanner, a stacked storage capacitor structure is formed. The equivalentcircuit for the pixel structure of FIG. 4 is shown in FIG. 8. As withthe fabrication process as described in conjunction with FIGS. 2 and 3,a five-mask process can be used.

As can be seen in the equivalent circuits shown in FIGS. 7 and 8, thesource-drain metal layer M2 is a shared capacitor plate for the storagecapacitors C1 and C2 and these two capacitors are connected at Via 3 inparallel so as to increase the charge storage capacity associated withthe pixel electrode 10 (FIG. 7) or with the pixel electrode segments 11,11′ (FIG. 8). In both embodiments, M1 and ITO 20 are separately used fortwo capacitor plates of the stacked capacitor structure, and insulatorlayers 22 and 24 are separately used as the dielectric for C1 and thedielectric for C2. The difference between the two embodiments is whereM1 is connected to. All the electrically conductive layers M1, M2, ITO20 and the insulator layers 22, 24 are generally required in thefive-mask fabricating process for most TFT-LCD displays. It is thereforeapparent from the present description that a stacked storage capacitorstructure, according to the present invention, can be fabricated fora-Si TFT-LCD display without additional material layers or masks.According to the present invention, the amount of pixel real estateassociated with the storage capacitor is thereby minimized, which inturn maximizes the aperture ratio of the pixel, providing betterperformance as the resolution of the pixel increases.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the structure and method ofthe present invention without departing from the scope of the presentinvention. As a result, it is intended that the present invention coverssuch modifications and variations provided that they fall within thescope of the following claims and their equivalents.

1. A stacked storage capacitor structure for a thin film transistorliquid crystal display having a plurality of pixels, each pixel having apixel area, wherein at least some of the pixels have a storage capacitorformed substantially within the pixel area and associated with thestacked storage capacitor structure, the stacked storage capacitorstructure comprising: a first storage capacitor having a first plateformed by a first electrically conductive layer, a second plate formedby a second electrically conductive layer and a dielectric formed by afirst insulator layer positioned between the first electricallyconductive layer and the second electrically conductive layer; and asecond storage capacitor having a first plate formed by a thirdelectrically conductive layer, a second plate formed by the secondelectrically conductive layer and a dielectric formed by a secondinsulator layer positioned between the first and second plates, whereinthe first electrically conductive layer and the third electricallyconductive layer are electrically connected to each other so that thefirst and second storage capacitors are electrically connected inparallel, and wherein the second electrically conductive layer ispositioned between the first electrically conductive layer and the thirdelectrically conductive layer, wherein each of said at least some of thepixels has a gate line disposed at one edge section of the pixel areafor controlling electric charges in the first storage capacitor and thesecond storage capacitor, and wherein the stacked storage capacitorstructure is formed substantially in said one edge section, and whereineach of said at least some of the pixels comprises a pixel electrodelocated within the pixel area adjacent to said one edge section in anon-overlapping manner, and the second electrically conductive layercomprises a first section having a first width and an extended sectionextending from the first section in a direction different from that ofthe gate line, the extended section having second width smaller than thefirst width, the extended section of the second electrically conductivelayer arranged to provide electrical contact with the pixel electrode ata connection point within the pixel electrode.
 2. The stacked storagecapacitor structure as defined in claim 1, wherein each of said at leastsome of the pixels has a semiconductor switching element electricallyconnected to the pixel electrode.
 3. The stacked storage capacitorstructure as defined in claim 2, wherein the switching element has afirst switching end, a second switching end and a switching controlterminal, the first switching end operatively connected to a signalline, the second end operatively connected to the pixel electrode, andwherein each of said at least some of the pixels further comprises afurther gate line operatively connected to the switching controlterminal of the switch element for causing the opening and closingbetween the first and second switching ends.
 4. The stacked storagecapacitor structure as defined in claim 3, wherein the secondelectrically conductive layer is operatively connected to the secondswitching end of the switching element via the pixel electrode and thefirst electrically conductive layer is operatively connected to the gateline.
 5. The stacked storage capacitor structure as defined in claim 4,wherein the first switching end is a source terminal, the secondswitching end is a drain terminal, and the switching control terminal isa gate terminal of a transistor, and wherein the first electricallyconductive layer is a gate metal layer, the first insulator layer is agate insulator layer and second electrically conductive layer is asource-drain metal layer.
 6. The stacked storage capacitor structure asdefined in claim 5, wherein the third electrically conductive layer ismade substantially of indium-tin oxide, and the second insulator layeris a passivation insulator layer.
 7. The stacked storage capacitorstructure as defined in claim 6, wherein part of the passivationinsulator layer is disposed adjacent to part of the gate insulatorlayer, and the pixel electrode is made substantially of indium-tinoxide, and wherein at least part of the pixel electrode and part of thethird electrically conductor layer are disposed on different sections ofthe passivation insulator layer.
 8. A method of increasing chargestorage capacity in a thin film transistor liquid crystal display havinga plurality of pixels, each pixel having a pixel area and a pixelelectrode located within the pixel area, wherein at least some of thepixels have a storage capacitor structure formed at a section of thepixel area substantially within the pixel area for storing electriccharges associated with the pixel electrode, and wherein the section isadjacent to the pixel electrode in a non-overlapping manner, said methodcomprising the steps of: forming a first storage capacitor having afirst plate formed by a first electrically conductive layer, a secondplate formed by a second electrically conductive layer and a dielectricformed by a first insulator layer positioned between the firstelectrically conductive layer and the second electrically conductivelayer; forming a second storage capacitor having a first plate formed bya third electrically conductive layer, a second plate formed by thesecond electrically conductive layer and a dielectric formed by a secondinsulator layer positioned between the first and second plates, whereinthe third electrically conductive layer extends in a first direction;electrically connecting the first electrically conductive layer to thethird electrically conductive layer so that the first and second storagecapacitors are electrically connected in parallel for forming thestorage capacitor structure, and wherein the second electricallyconductive layer is positioned between the first electrically conductivelayer and the third electrically conductive layer, the secondelectrically conductive layer comprises a wider section and a narrowerextended section extending from the wider section in a second directiondifferent from the first direction; and electrically connecting theextended section of the second electrically conductive layer to thepixel electrode at a connection point within the pixel electrode.
 9. Athin film transistor liquid crystal display comprising: a plurality ofpixels arranged in rows and columns, each pixel having a pixel area, aplurality of signal lines disposed between the pixel columns; and aplurality of gate lines disposed between the pixel rows, wherein atleast some of the pixels have a storage capacitor structure formedsubstantially within the pixel area, the storage capacitor structurecomprising: a first storage capacitor having a first plate formed by afirst electrically conductive layer, a second plate formed by a secondelectrically conductive layer and a dielectric formed by a firstinsulator layer positioned between the first electrically conductivelayer and the second electrically conductive layer; and a second storagecapacitor having a first plate formed by a third electrically conductivelayer, a second plate formed by the second electrically conductive layerand a dielectric formed by a second insulator layer positioned betweenthe first and second plates, wherein the first electrically conductivelayer and the third electrically conductive layer are electricallyconnected to each other so that the first and second storage capacitorsare electrically connected in parallel, and wherein the secondelectrically conductive layer is positioned between the firstelectrically conductive layer and the third electrically conductivelayer, wherein each of said at least some of the pixels comprises one ofthe plurality of gate lines disposed at one edge section of the pixelarea for controlling electric charges in the first storage capacitor andthe second storage capacitor, and wherein the storage capacitorstructure is formed substantially in said one edge section, and whereineach of said at least some of the pixels comprises a pixel electrodelocated within the pixel area adjacent to said one gate line in anon-overlapping manner, and the second electrically conductive layercomprises a wider section and a narrower extended section, the narrowerextended section arranged to provide electrical contact with the pixelelectrode at a connection point within the pixel electrode.
 10. Thethin-film liquid crystal display as defined in claim 9, wherein each ofsaid at least some of the pixels has a semiconductor switching elementelectrically connected to the pixel electrode.
 11. The thin-film liquidcrystal display as defined in claim 10, wherein the switching elementhas a first switching end, a second switching end and a switchingcontrol terminal, the first switching end operatively connected to oneof said plurality of signal lines, the second end operatively connectedto the pixel electrode, and wherein the switching control terminal ofthe switch element is operatively connected to another one of saidplurality of gate lines for causing the opening and closing between thefirst and second switching ends.
 12. The stacked storage capacitorstructure as defined in claim 1, wherein the gate line is disposedadjacent to the pixel electrode in a non-overlapping fashion.
 13. Themethod as defined in claim 8, wherein each of said at least some of thepixels comprises a gate line arranged to control electric charges in thefirst storage capacitor and the second storage capacitor, the gate linelocated at the section adjacent to the pixel electrode in anon-overlapping manner.
 14. The thin-film liquid crystal display asdefined in claim 9, wherein the gate line is parallel to a firstdirection, and the narrower extended section of the second electricallyconductive layer is extended from the wider section in a seconddirection different from the first direction.
 15. The stacked storagecapacitor structure as defined in claim 1, wherein the direction of theextended section is substantially perpendicular to the direction of thegate line.
 16. The method as defined in claim 8, wherein the seconddirection is substantially perpendicular to the first direction.
 17. Thethin-film liquid crystal display as defined in claim 14, wherein thesecond direction is substantially perpendicular to the first direction.18. The stacked storage capacitor structure as defined in claim 1,wherein the first width of the first section defines a dimension of thesecond electrically conductive layer and the dimension is substantiallyparallel to the first direction.
 19. The thin-film liquid crystaldisplay as defined in claim 9, wherein the wider section of the secondelectrically conductive layer has a width substantially parallel to thefirst direction.
 20. The method as defined in claim 8, wherein the thirdelectrically conductive layer comprises a first section having a firstwidth and an extended section having a second width smaller than thefirst width, and the extended section extends from the first section inthe first direction.
 21. The method as defined in claim 8, wherein thewider section of the second electrically conductive layer has a widthsubstantially parallel to the first direction.